Chip fabrication for Transmission Electron Microscopy holder enabling in-situ studies of electrochemical processes

Contacts:

Kristian Mølhave, DTU Nanotech, (Kristian.Molhave@nanotech.dtu.dk)

Murat Nulati Yesibolati, DTU Nanotech, (nuye@nanotech.dtu.dk) 

The resolution of transmission electron microscope (TEM) has been significantly improved. It reaches 0.5 Å scale as reported. [1] Therefore, tremendous effort is increasingly being spent on dynamic process in situ [2-5]. Generally, a double-chip setup with electron transparent window was used for observing liquid as shown in Figure 1.  However, one of the main issues of the setup is silicon nitride (SiNx) membrane bulging due to the large window (ca. 50 μm) and the liquid vapor pressure relative to the TEM vacuum, which made it difficult to achieve high resolution.[3]

Figure 1. Schematic view of E-chips setup with two SiNx window

Recently, we fabricated a holder with 5 electrical contacts and liquid flow. Hence, we now urgently need to fabricate a chip with 5 electrodes and SiNx window as shown in Figure 2 to enable studies of electrochemical processes in the TEM. Various chips, especially the electrodes design in window area will assist us implement different experiments and applications, e.g. electrodeposition, lithiation process in a nano battery, conductivity measurements etc.

Figure 2. Schematic view of E-chip for holder with electrical contacts and liquid flow

Aims:

Design and fabricate E-chips for different TEM holders

Test and sample characterizations

Prerequisite:

Interested in working in cleanroom

Preferably familiar with AutoCAD, Solidworks, and L-edit
Some basic knowledge of electrochemistry could be advantageous for the ensuing experiments