Fabrication and Characterization of Chips for Transmission Electron Microscopy of Liquids
Contacts:
Eric Jensen, DTU-Nanotech, 45 25 68 43(Eric.Jensen@nanotech.dtu.dk)
Kristian Mølhave, DTU-Nanotech, 25 12 66 72 (kristian.molhave@nanotech.dtu.dk)
Project Goals: In this project you will learn different cleanroom fabrication processes involved in creating the chip e.g. photolithography, thin-film growth, reactive ion etch (RIE), KOH etch, lift-off, and with the characterization techniques e.g. ellipsometry, profilometry, SEM imaging, AFM force measurements. This project lends itself well to students interested in cleanroom fabrication and processing since you will be using a lot of time in the cleanroom. We might mention that cleanroom experience is always a plus on the CV, when looking for potential BSc and MSc projects later on!
Introduction: Transmission Electron Microscopes (TEM) are able to achieve high resolution of small samples. However, these samples must be dry (TEM) or at low pressure (Environmental-TEM). In order to image fully hydrated samples a special chip has been designed. In this project you will fabrication said chips, characterize them and possibly optimize the fabrication process.
Project goal: In this project you will learn different cleanroom fabrication processes involved in creating the chip e.g. photolithography, thin-film growth, reactive ion etch (RIE), KOH etch, lift-off, and with the characterization techniques e.g. ellipsometry, profilometry, SEM imaging, AFM force measurements.
This project lends itself well to students interested in cleanroom fabrication and processing since you will be using a lot of time in the cleanroom. We might mention that cleanroom experience is always a plus on the CV, when looking for potential BSc and MSc projects later on!